Product Details
It is primarily used for sputtering metals, non-metallic materials, or alloys. The resulting coatings exhibit excellent adhesion, density, and reproducibility, making it an ideal piece of equipment for research institutes, universities, and enterprises engaged in materials research and the fabrication of precision components.
Product Application Cases
Basic Technical Specifications
| Model and Dimensions | ZZS-550B | ZZS-800B | ZZS-300B | ZZS-1550B | ZZS-1800B | ZZS-2050B | ZZS-2350B | ZZs-2700B |
| Dimensions (mm) | 550xH680 | 800xH900 | 1300xH1500 | 1550xH1700 | 1800xH1800 | 2050xH1500 | 2350xH1500 | 2700xH1850 |
| Construction | Upright, front-opening, 304 stainless steel | |||||||
| Rotational Speed | 0–30 RPM (variable-frequency speed control) | |||||||
| Pumping Speed | From atmospheric pressure to 3.0×10⁻³ Pa in ≤15 minutes (no load) | |||||||
| Ultimate Vacuum | 3.0x10－⁴ P | |||||||
| Fixture | Center-mounted rotating umbrella frame, single-piece or split-type | |||||||
| Heating System | Armored heater, adjustable from ambient temperature to 350°C | |||||||
| Vacuum System | Low-vacuum pump set + high-vacuum pump + cryogenic trap | |||||||
| Control System | Industrial control system + touchscreen + PLC, integrated manual/automatic control | |||||||
| Gas Supply System | Mass flow meter control | |||||||
| Coating System | Resistive evaporation source + electron gun + ion source | |||||||
| Coating Thickness Control System | AR, UV/IR cut filters, AF, anti-reflective coatings, decorative coatings, bandpass filters, HR coatings, etc. |
|||||||
| Coating Applications | Infocare | |||||||
| Power Supply | Three-phase five-wire 220/380V 50Hz; voltage fluctuation range: three-phase 242–399V, single-phase 198–231V; frequency fluctuation range: 49–51 Hz | |||||||
| Water Supply | Industrial softened water; water pressure: 0.2–0.6 MPa; inlet water temperature ≤25°C | |||||||
| Gas Supply | 0.4–0.6 MPa | |||||||
Previous: No More