News
News

Ultra-Clean Ultra-High Vacuum Equipment for Optics & Aerospace Field

06 Jun, 2026
  Cryogenic vacuum pump (cryopump) is a capture-type ultra-high vacuum pumping device different from conventional mechanical transfer pumps, capturing all gas molecules via ultra-low temperature cold panel condensation instead of compressing and exhausting gas outward, capable of reaching ultimate ultra-high vacuum up to 10 Pa with zero oil pollution and extremely clean working environment, irreplaceable for aerospace component testing, high-precision optical coating and semiconductor chip manufacturing.

Its internal core cold head is refrigerated down to 10K~120K by closed-cycle cryocooler or liquid nitrogen/liquid helium, all gas molecules contacting cold surface condense into solid layer attached on cold panel to lower chamber gas density continuously.


  Unlike turbo pumps limited in pumping efficiency for hydrogen and helium inert gas, cryopumps achieve efficient capture of all common industrial gases including noble gas, widely equipped inside large vacuum coating chambers producing mobile phone AR anti-reflection glass and aviation optical lens, preventing residual trace gas impurity from damaging thin-film compactness and light transmittance. In aerospace industry, cryopump-equipped vacuum thermal test chambers simulate outer space near-vacuum low-temperature environment on ground, testing stability of satellite parts and rocket components under extreme space conditions before formal launch.

xx 
  Cryopump working requires pre-pumping by front-end rough mechanical pump to drop chamber pressure below 10??Pa first; after long-period operation, thick condensed solid gas layer on cold panel reduces pumping capacity, needing regular regeneration heating to evaporate captured gas and restore cold panel adsorption performance. Though cryopump procurement and maintenance cost exceed traditional turbo pumps, its unmatched ultra-clean vacuum quality makes it the preferred pumping solution for high-end precision manufacturing factories in developed countries. Recent years witness cost reduction of domestic-made cryopumps, boosting export volume to European optical and aerospace processing enterprises yearly.

Get A Quote Now !