The KTD series of high-vacuum oil diffusion pumps feature a convex cavity design and are capable of achieving high and ultra-high vacuum levels ranging from 10⁻² to 10⁻⁵ Pa. Their advantages include a built-in water-cooled oil trap, high effective pumping speed, low oil carryover, and a simple structure.
Main Technical Specifications of the K T D Series High-Vacuum Low-Oil-Return Diffusion Pumps
| Specifications/Model |
KTD-320 |
KTD-500 |
KTD-800 |
KTD-1000 |
| Maximum Pressure (Pa) |
≤5x10﹣⁵ |
| Pumping Speed (L/s) |
≥140 |
| Critical Fore-vacuum Pressure (Pa) |
≥4400 |
≥10000-12000 |
≥22000-24000 |
≥35000-38000 |
| Oil Return Rate (mg/cm²·min) |
≤5x10﹣³ |
| Heating Power (kW) |
4 |
6.9 |
15 |
24 |
| Power Supply Voltage (V) |
220 |
380 |
| Pump Oil Grade |
KS-3 diffusion pump oil or 275 silicone oil |
| Pump Oil Volume (L) |
1.5-1.8 |
4.4-5 |
10 |
16 |
| Recommended Fore-vacuum Pump Speed (L/s) |
30 |
70 |
300 |
300 |
| Dimensions (L x W x H) |
730x500x900 |
1065x680x1280 |
1700x1000x1945 |
2020 x 1290x2315 |
| Weight (kg) |
85 |
285 |
850 |
980 |
Pump Speed Curves for the KTD Series High-Vacuum Low-Back-Diffusion Pumps

Connection Dimensions for the KTD Series High-Vacuum Low-Oil-Return Diffusion Pumps
| Specifications/Model |
KTD-320 |
KTD-500 |
KTD-800 |
KTD-1000 |
| DN |
320 |
500 |
800 |
1000 |
| D1 |
425 |
610 |
920 |
1140 |
| D2 |
395 |
580 |
880 |
1090 |
| A |
400 |
610 |
920 |
1150 |
| L |
240 |
500 |
800 |
1060 |
| nl-∅1 |
12-∅14 |
16-∅14 |
20-∅21 |
24-∅23 |
| dn |
100 |
160 |
300 |
350 |
| dl |
165 |
225 |
380 |
435 |
| d2 |
145 |
200 |
350 |
405 |
| n2-∅2 |
8-∅9 |
8-∅12 |
8-∅14 |
8-∅14 |
| H |
890 |
1265 |
1940 |
2310 |
KTD Series High-Vacuum Low-Oil-Return Diffusion Pumps