The KA series high-vacuum oil diffusion pumps are the primary equipment used to achieve high and ultra-high vacuums ranging from 10⁻¹ to 10⁻⁵ Pa. Their advantages include a low profile, compact size, and high pumping speed. They utilize an internal heating system, offering a high critical fore-vacuum pressure at 10⁻¹ Pa, and feature a three-stage pump core.
Main Technical Specifications of the K A Series High-Vacuum Oil Diffusion Pumps
| Specifications/Model |
KA-500 |
KA-600 |
KA-800 |
| Maximum Pressure (Pa) |
≤5x10﹣⁵ |
| Pumping Speed (L/s) |
≥8000 |
≥14500 |
≥24000 |
| Critical Fore-vacuum Pressure (Pa) |
≥40 |
≥50 |
| Oil Return Rate (mg/cm²·min) |
≤5x10﹣³ |
| Heating Power (kW) |
6.9 |
8.4 |
15-18 |
| Power Supply Voltage (V) |
380 |
| Pump Oil Grade |
KS-3 diffusion pump oil or 275 silicone oil |
| Pump Oil Volume (L) |
5 |
7 |
8-10 |
| Recommended Fore-vacuum Pump Speed (L/s) |
70 |
140 |
140 |
| Dimensions (L x W x H) |
680x550x838 |
950×765×1070 |
1200x960 x1455 |
| Weight (kg) |
120 |
300 |
450 |
Pump Speed Curves for the K A Series High-Vacuum Oil Diffusion Pumps

K A Series High-Vacuum Oil Diffusion Pump Connection Dimensions
| Specifications/Model |
KA-500 |
KA-600 |
KA-800 |
| DN |
500 |
600 |
800 |
| D1 |
550 |
710 |
920 |
| D2 |
510 |
670 |
890 |
| A |
405 |
480 |
890 |
| L |
405 |
440 |
800 |
| nl-∅1 |
Brake caliper link |
12-∅21 |
21-∅14 |
| dn |
100 |
150 |
160 |
| dl |
130 |
220 |
225 |
| d2 |
107 |
195 |
200 |
| n2-∅2 |
Brake caliper link |
8-∅12 |
8-∅10 |
| H |
838 |
1040 |
1450 |
KA Series High-Vacuum Oil Diffusion Pumps